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薄膜润滑 5

Cu(In 4

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Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated

Zilian QU,Yonggang MENG,Qian ZHAO

《机械工程前沿（英文）》 2015年第10卷第1期页码 1-6 doi: 10.1007/s11465-015-0325-2

摘要：

This paper proposes a new eddy current method, named equivalent unit method (EUM), for the thickness measurement of the top copper film of multilayer interconnects in the chemical mechanical polishing (CMP) process, which is an important step in the integrated circuit (IC) manufacturing. The influence of the underneath circuit layers on the eddy current is modeled and treated as an equivalent film thickness. By subtracting this equivalent film component, the accuracy of the thickness measurement of the top copper layer with an eddy current sensor is improved and the absolute error is 3 nm for sampler measurement.

关键词： CMP eddy current multilayer wafer Cu interconnects equivalent unit

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FEM-based strain analysis study for multilayer sheet forming process

Rongjing ZHANG,Lihui LANG,Rizwan ZAFAR

《机械工程前沿（英文）》 2015年第10卷第4期页码 373-379 doi: 10.1007/s11465-015-0371-9

摘要：

Fiber metal laminates have many advantages over traditional laminates (e.g., any type of fiber and resin material can be placed anywhere between the metallic layers without risk of failure of the composite fabric sheets). Furthermore, the process requirements to strictly control the temperature and punch force in fiber metal laminates are also less stringent than those in traditional laminates. To further explore the novel method, this study conducts a finite element method-based (FEM-based) strain analysis on multilayer blanks by using the 3A method. Different forming modes such as wrinkling and fracture are discussed by using experimental and numerical studies. Hydroforming is used for multilayer forming. The Barlat 2000 yield criteria and DYNAFORM/LS-DYNA are used for the simulations. Optimal process parameters are determined on the basis of fixed die-binder gap and variable cavity pressure. The results of this study will enhance the knowledge on the mechanics of multilayer structures formed by using the 3A method and expand its commercial applications.

关键词： finite element method (FEM) strain analysis multilayer sheet forming

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A spectrally selective surface structure for combined photothermic conversion and radiative sky cooling

Bin ZHAO, Xianze AO, Nuo CHEN, Qingdong XUAN, Mingke HU, Gang PEI

《能源前沿（英文）》 2020年第14卷第4期页码 882-888 doi: 10.1007/s11708-020-0694-z

摘要： The sun and outer space are the ultimate heat and cold sources for the earth, respectively. They have significant potential for renewable energy harvesting. In this paper, a spectrally selective surface structure that has a planar polydimethylsiloxane layer covering a solar absorber is conceptually proposed and optically designed for the combination of photothermic conversion (PT) and nighttime radiative sky cooling (RC). An optical simulation is conducted whose result shows that the designed surface structure (i.e., PT-RC surface structure) has a strong solar absorption coefficient of 0.92 and simultaneously emits as a mid-infrared spectral-selective emitter with an average emissivity of 0.84 within the atmospheric window. A thermal analysis prediction reveals that the designed PT-RC surface structure can be heated to 79.1°C higher than the ambient temperature in the daytime and passively cooled below the ambient temperature of approximately 10°C in the nighttime, indicating that the designed PT-RC surface structure has the potential for integrated PT conversion and nighttime RC utilization.

关键词： solar energy photothermic conversion radiative sky cooling spectral selectivity multilayer film

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Mechanical properties and microstructure of multilayer graphene oxide cement mortar

《结构与土木工程前沿（英文）》 2021年第15卷第4期页码 1058-1070 doi: 10.1007/s11709-021-0747-3

摘要： This study reports on the effects of multilayer graphene oxide (MGO) on compressive strength, flexural strength, and microstructure of cement mortar. The cement mortar was prepared with type P. II. 52.5 Portland cement, standard sand, and MGO. Four mixes were prepared with inclusion of MGO (0%, 0.02%, 0.04%, and 0.06% by weight of cement). The testing result shows that the compressive of GO-cement mortar increased by 4.84%–13.42%, and the flexural strength increased by 4.37%–8.28% at 3 d. GO-cement mortar’s compressive strength and flexural strength at 7 d increased by 3.84%–12.08% and 2.54%–13.43%, respectively. MGO made little contribution to the increases of compressive strength and flexural strength of cement mortar at 28 d. The results of X-ray diffraction (XRD), scanning electron microscope (SEM), and nitrogen (N₂) adsorption/desorption tests show that the types of hydration products and crystal grain size did not change after adding MGO. Still, it can help to improve the microstructure of the cement mortar via regulating hydration products and can provide more condensed cores to accelerate hydration. Furthermore, the regulating action of MGO for the microstructure of cement mortar at an early age was better than that at 28 d.

关键词： graphene oxide cement mortar mechanical properties microstructure

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Experimental verification of the interface wave method to detect interlaminar damage of a metal multilayer

Bing LI,Xu GENG,Tong LU,Lei QIANG,Minghang LI

《机械工程前沿（英文）》 2015年第10卷第4期页码 380-391 doi: 10.1007/s11465-015-0365-7

摘要：

The interface wave traveling along the boundary of two materials has been studied for nearly a century. However, experiments, engineering applications, and interface wave applications to the non-destructive inspection of interlaminar composite have developed slowly. In this research, an experiment that applies Stoneley waves (a type of interfacial wave between two solid half-spaces) is implemented to detect the damage in a multilayer structure. The feasibility of this method is also verified. First, the wave velocity and wave structure of Stoneley waves at a perfectly bonded aluminum-steel interface are obtained by solving the Stoneley wave dispersion equation of two elastic half-spaces. Thereafter, an experiment is conducted to measure the Stoneley wave velocity of an aluminum-steel laminated beam and to locate interlaminar cracks by referring to the Stoneley wave velocity and echo wave time. Results indicate that the location error is less than 2%. Therefore, Stoneley waves show great potential as a non-destructive inspection method of a multilayer structure.

关键词： crack localization interface waves Stoneley waves interlaminar damage multilayer structure

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Experimental research on the multilayer compartmental particle damper and its application methods on

Zhenyuan LUO, Weiming YAN, Weibing XU, Qinfei ZHENG, Baoshun WANG

《结构与土木工程前沿（英文）》 2019年第13卷第4期页码 751-766 doi: 10.1007/s11709-018-0509-z

摘要： Particle damping technology has attracted extensive research and engineering application interest in the field of vibration control due to its prominent advantages, including wide working frequency bands, ease of installation, longer durability and insensitivity to extreme temperatures. To introduce particle damping technology to long-period structure seismic control, a novel multilayer compartmental particle damper (MCPD) was proposed, and a 1/20 scale test model of a typical long-period self-anchored suspension bridge with a single tower was designed and fabricated. The model was subjected to a series of shaking table tests with and without the MCPD. The results showed that the seismic responses of the flexible or semi-flexible bridge towers of long-period bridges influence the seismic responses of the main beam. The MCPD can be conveniently installed on the main beam and bridge tower and can effectively reduce the longitudinal peak displacement and the root mean square acceleration of the main beam and tower. In addition, no particle accumulation was observed during the tests. A well-designed MCPD can achieve significant damping for long-period structures under seismic excitations of different intensities. These results indicate that the application of MCPDs for seismic control of single-tower self-anchored suspension bridges and other long-period structures is viable.

关键词： energy dissipation devices multilayer compartmental particle damper self-anchored suspension bridges shaking tables test long-period structure seismic control

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Numerical simulation of liquid falling film on horizontal circular tubes

Fengdan SUN, Songlin XU, Yongchuan GAO

《化学科学与工程前沿（英文）》 2012年第6卷第3期页码 322-328 doi: 10.1007/s11705-012-1296-z

摘要： The objective of this study is to investigate numerically the flow characteristics of falling film on horizontal circular tubes. Numerical simulations are performed using FLUENT for 2D configurations with one and two cylinders. The volume of fluid method is used to track the motion of liquid falling film and the gas-liquid interface. The effect of flow characteristics on heat and transfer coefficient may be remarkable, although it has been neglected in previous studies. The velocity distribution and the film thickness characteristics on the top tube, some special flow characteristics on the bottom tube, intertube flow modes and effect of liquid feeder height on flow characteristics have been studied. Our simulations indicate that 1) the velocity distributions of the upper and lower parts of the tube are not strictly symmetric and non-uniform, 2) the film thickness depends on flow rate and angular distributions, 3) the flow characteristics of the top tube are different from those of the bottom tube, 4) three principal and two intermediate transition modes are distinguished, and 5) the liquid feed height plays an important role on the formation of falling film. The numerical results are in a good agreement with the theoretical values by the Nusselt model and the reported results.

关键词： falling film horizontal tube flow characteristics film thickness liquid feeder height

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Experiment and optimal design of a collection device for a residual plastic film baler

Qi NIU,Xuegeng CHEN,Chao JI,Jie WU

《农业科学与工程前沿（英文）》 2015年第2卷第4期页码 347-354 doi: 10.15302/J-FASE-2015077

摘要： It is imperative to carry out research on residual plastic film collection technology to solve the serious problem of farmland pollution. The residual plastic film baler was designed as a package for film strip collection, cleaning and baling. The collection device is a core component of the baler. Response surface analysis was used in this study to optimize the structure and working parameters for improving the collection efficiency of residual film and the impurity of film package. The results show that the factors affecting the collection rate of residual film and the impurity of the film package are the speed ratio ( ) between the trash removal roller and eccentric collection mechanism, the number ( ) and the mounting angle ( ) of spring teeth in the same revolution plane. For the collection rate, the importance of the three factors are in the order, . Meanwhile, for the impurity, the importance of three factors are in the order, . When the speed ratio, the mounting angle and the number of spring teeth was set at 1.6°, 45°, and 8°, respectively, the collection rate of residual film was 88.9% and the impurity of residual film package was 14.2% for the baler.

关键词： residual film collection device collection rate of residual film impurity of film package optimization baler

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薄膜润滑研究的回顾与展望

雒建斌,张朝辉,温诗铸

《中国工程科学》 2003年第5卷第7期页码 84-89

摘要：

薄膜润滑是20世纪90年代以来广泛研究的新型润滑状态。它是界于弹流润滑和边界润滑之间的一种过渡润滑状态，有着自己独特的润滑规律。文章回顾了薄膜润滑的研究历史，包括薄膜润滑概念的提出、测试技术的发展、薄膜润滑的膜厚特性、润滑机理探索以及计算理论等方面的研究成果与主要进展。

关键词：薄膜润滑有序膜膜厚测量微结构

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Thin-liquid-film evaporation at contact line

Hao WANG, Zhenai PAN, Zhao CHEN

《能源前沿（英文）》 2009年第3卷第2期页码 141-151 doi: 10.1007/s11708-009-0020-2

摘要： When a liquid wets a solid wall, the extended meniscus near the contact line may be divided into three regions: a nonevaporating region, where the liquid is adsorbed on the wall; a transition region or thin-film region, where effects of long-range molecular forces (disjoining pressure) are felt; and an intrinsic meniscus region, where capillary forces dominate. The thin liquid film, with thickness from nanometers up to micrometers, covering the transition region and part of intrinsic meniscus, is gaining interest due to its high heat transfer rates. In this paper, a review was made of the researches on thin-liquid-film evaporation. The major characteristics of thin film, thin-film modeling based on continuum theory, simulations based on molecular dynamics, and thin-film profile and temperature measurements were summarized.

关键词： meniscus thin film contact line disjoining pressure evaporation

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Modeling of coal swelling induced by water vapor adsorption

Zhejun PAN

《化学科学与工程前沿（英文）》 2012年第6卷第1期页码 94-103 doi: 10.1007/s11705-011-1172-2

摘要： Gas adsorption-induced coal swelling is a well-know phenomenon. Coal swelling or shrinkage by adsorption or desorption of water vapor has not been well understood but has significant implications on gas drainage process for underground coal mining and for primary and enhanced coalbed methane production. Decreased matrix moisture content leads to coal shrinkage and thus the change of cleat porosity and permeability under reservoir conditions. Unlike gas adsorption in coal which usually forms a single layer of adsorbed molecules, water vapor adsorption in the coal micropores forms multilayer of adsorbed molecules. In this work, a model has been developed to describe the coal swelling strain with respect to the amount of moisture intake by the coal matrix. The model extended an energy balance approach for gas adsorption-induced coal swelling to water vapor adsorption-induced coal swelling, assuming that only the first layer of adsorbed molecules of the multilayer adsorption changes the surface energy, which thus causes coal to swell. The model is applied to describe the experimental swelling strain data measured on an Australian coal. The results show good agreement between the model and the experimental data.

关键词： multilayer adsorption vapour pressure coal shrinkage relative humidity permeability

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Surface-tailoring chlorine resistant materials and strategies for polyamide thin film composite reverse

《化学科学与工程前沿（英文）》 2022年第16卷第5期页码 564-591 doi: 10.1007/s11705-021-2109-z

摘要： Polyamide thin film composite membranes have dominated current reverse osmosis market on account of their excellent separation performances compared to the integrally skinned counterparts. Despite their very promising separation performance, chlorine-induced degradation resulted from the susceptibility of polyamide toward chlorine attack has been regarded as the Achilles’s heel of polyamide thin film composite. The free chlorine species present during chlorine treatment can impair membrane performance through chlorination and depolymerization of the polyamide selective layer. From material point of view, a chemically stable membrane is crucial for the sustainable application of membrane separation process as it warrants a longer membrane lifespan and reduces the cost involved in membrane replacement. Various strategies, particularly those involved membrane material optimization and surface modifications, have been established to address this issue. This review discusses membrane degradation by free chlorine attack and its correlation with the surface chemistry of polyamide. The advancement in the development of chlorine resistant polyamide thin film composite membranes is reviewed based on the state-of-the-art surface modifications and tailoring approaches which include the in situ and post-fabrication membrane modifications using a broad range of functional materials. The challenges and future directions in this field are also highlighted.

关键词： reverse osmosis polyamide thin film composite membranes chlorine resistance surface modification

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Piezoelectric film-actuated motion platform with high resolution

HUA Shunming, ZHANG Hongzhuang, CHENG Guangming, FAN Zunqiang, LIU Jianfang

《机械工程前沿（英文）》 2008年第3卷第3期页码 265-269 doi: 10.1007/s11465-008-0041-2

摘要： A piezoelectric film-actuated motion platform with high resolution, which can run in two directions within a horizontal plane, is presented. On the basis of the analysis of the working principle of a stick-slip mechanism, a mathematical model describing its dynamic behavior is set up and simulated. Experiments of the motion performance and carrying ability on the prototype are conducted. Results show that this type of platform has advantages including a simple structure, small volume, light weight, stable step length, and large traveling range. When the driving voltage is less than 30 V, step error is less than 0.5 ?m. The carrying ability of the platform is terrific and about 7–8 times its weight.

关键词： mathematical stick-slip mechanism piezoelectric film-actuated analysis terrific

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Heat and mass transfer of ammonia-water in falling film evaporator

Xianbiao BU, Weibin MA, Huashan LI

《能源前沿（英文）》 2011年第5卷第4期页码 358-366 doi: 10.1007/s11708-011-0161-y

摘要： To investigate the performance of heat and mass transfer of ammonia-water during the process of falling film evaporation in vertical tube evaporator, a mathematical model of evaporation process was presented, the solution of which that needed a coordinate transformation was based on stream function. The computational results from the mathematical model were validated with experimental data. Subsequently, a series of parameters, such as velocity, film thickness and concentration, etc., were obtained from the mathematical model. Calculated results show that the average velocity and the film thickness change dramatically at the entrance region when <100 mm, while they vary slightly with the tube length in the fully developed region when >100 mm. The average concentration of the solution reduces along the tube length because of evaporation, but the reducing tendency becomes slow. It can be concluded that there is an optimalβrelationship between the tube length and the electricity generated. The reason for the bigger concentration gradient in the direction is that the smooth tube is chosen in the calculation. It is suggested that the roll-worked enhanced tube or other enhanced tube can reduce the concentration gradient in the film thickness direction and enhance the heat and mass transfer rate.

关键词： falling film evaporation ammonia-water heat and mass transfer

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Dynamic analysis of free-surface thin film flows driven by gravity over undulated substrate

Zhaomiao LIU, Xin LIU, Guobin WANG, Hong LIAO,

《机械工程前沿（英文）》 2010年第5卷第2期页码 219-225 doi: 10.1007/s11465-010-0010-4

摘要： This paper studies thin film flows with free surfaces driven by gravity through two types of undulated planes: periodically sinusoidal plane and triangle. The substrate plane is fixed and inclined to a certain angle and the flow with a free surface. Through finite element method (FEM), commenced from Navier-Stokes equations and continuity equation, the exact numerical results of free-surface film flows are obtained through discretization solution to finite equations in flowing areas. Based on the numerical calculations, the streamlines and wall shearing stress during the flowing process are visualized via post-proceeding, and the streamlines separation, the onset and evolution of vortex near the substrate boundary during the flow are also analyzed. The influences from the waviness of the substrate planes profile, height of the triangle plane, and change of the film height on film flow dynamics properties are shown.

关键词： waviness triangle height film thickness streamlines separation vortex